無塵室的等級規範-永盛整合工程有限公司
Cleanroom Standard Cleanroom Classification Guidelines ISO 14644-1 Class 3 Class 4 Class 5 Class 6 Class 7 Class 8 Federal Standard 209E 1 10 100 1,000 10,000 100,000 Air changes / hour 360-540 300-540 240-480 150-240 60-90 5-48...