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FinFET Doping Options at 22nm, 14/16nm and 10nm Nodes

FinFET Doping Options 3-D FinFET require some form of S/D extension doping under the side wall spacer for gate overlap control. Two basic method of doping are either: •Direct junction doping by implantation with or without diffusion using: 1)Beam-line til...

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