薄膜工程 chapter-3 (note)
11 僅 供 教 學 使 用 僅 供 教 學 使 用 “Gas ballast” to improve pump operation When condensible vapors are pumped, they can only be compressed to their saturation vapor pressures Example: H 2O at 70ºC will condense when compressed to 312 mbar; further...