EBARA's Dry Pump-Family - PTB Sales - North American vacuum equipment service provider
Specification A 07 Pumping speed (N2) 50/60 Hz l/min. 700/833 Pumping speed (N2) 50/60 Hz m3/h 42/50 Ultimate pressure 50/60 Hz mbar 1x10-2/1x10 Ultimate pressure 50/60 Hz Pa 1.1/1.0 Water Consumption l/min. 3.5 Nitrogen Consumption SLM 9-11 ......