Slide 1 - Prof. Stephen J. Pearton's Research Group
InGaZnO TFTs on PET Depletion mode TFTs Process sequences Enhancement mode TFTs Enhancement Mode TFT : ... SiNx Plan to do Channel : IZO or IGZO or SIZO Gate dielectrics : SiO2, SiNx, Sc2O3 Fabricated Channel : IZO Gate dielectrics : SiO2 ......