化學氣相沉積
2 Thin Films for ICs Conductor ¾Al, Al-Si, Al-Si-Cu, Al-Cu ¾Ti, Co, W, WSi 2 ¾TiN, TaN Semiconductor ¾Crystalline Si, poly-Si, SiGe Dielectric ¾USG, BPSG, PSG, SOG ¾Si 3N 4, SiON ¾FSG, low k dielectric, high k dielectric, etc. Organic materials...