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SPIE | Journal of Micro/Nanolithography, MEMS, and MOEMS | Fabrication of micropressure sensor using

Wah Seng Wong; Ishak Abdul Azid; Kamarulazizi Ibrahim and Mutharasu Devarajan "Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043009 (Nov ......

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