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Study of tungsten oxidation in O2/H2/N2 downstream plasma

Study of tungsten oxidation in O 2/H 2/N 2 downstream plasma Songlin Xua and Li Diao Mattson Technology, Inc., Fremont, California 94538 Received 17 September 2007; accepted 21 February 2008; published 26 March 2008 The surface oxidation of tungsten is a ...

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